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Process Technology

2020s

2022: Sample shipments of 200mm SiC epi wafers begin (Resonac)

Resonac (Formerly Showa Denko) has begun the sample shipments of 200mm (8-inch) size high-quality (the 3rd generation) SiC epitaxial wafers for high-power semiconductor devices, which is the first in the world.

Schematic diagram of SiC bulk crystal growth

SiC epitaxial wafers

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